概要
● 6自由度振動應答
● Passive Isolator中10 Hz 以下低頻率不會發生共振現象
● Feedback 控制 ,使用Feedforward 來控制Stage 等的移動荷載將晃動值最小化● 精密度極高
● 將UNIT type模型高度標準化為 191 mm
特征
構成
● MRZ Actuator 4 units
● Controller & Amplifier 1 set
● Air Pressure & Regulator 1 set ● Electric Cables 1 set
● Air Tubes 1 set
● User’ s Manual 1 pcs
式樣
Types | MRZ-330 | MRZ-520 |
Paylode Range per 4 units | 4,000 ~ 12,800 | 10,000 ~ 32,000 |
Dimensions of a Unit | 504 X 404 X 191 | 694 X 594 X 191 |
Mass of a Unit | 60 | 110 |
Supplied Air Pressure | 0.6 ~ 0.8 (Clean dry air) |
Typical Air Consumption | 120 ~ 170 |
Maximum Air Consumption | 100 ~ 240 (AC. 50/60 Hz) (Single-Phase AC. 50/60 Hz) |
Power Supply Voltage | 72 |
Maximum Power Consumption | 0 ~ 40 |
Environmental Temperature | 35 ~ 85 |
Relative Humidity | Vibration Isolation by Air Pressure Contol |
Vibration Isolation Method | 435 X 300 X 118 |
Dimensions of Controller | 435 X 300 X 118 |
產品外形圖
